Title:
熱式流量計およびその製造方法
Document Type and Number:
Japanese Patent JP6563211
Kind Code:
B2
Abstract:
Provided is a thermal flow meter including a measurement tube 11 made of resin having an inlet 11a and an outlet 11b, and an internal flow passage 10c extending along an axis X, a sensor substrate 12 having a heating resistance wire and temperature detecting resistance wires formed on a detection surface 12d along the axis X, and a reinforcing plate 13. The sensor substrate 12 is bonded to the measurement tube 11 along the axis X with an adhesive, and the reinforcing plate 13 is bonded to the measurement tube 11 along the axis X with the adhesive with the internal flow passage 10c interposed between the sensor substrate 12 and the reinforcing plate 13.
Inventors:
Hironori Igarashi
Application Number:
JP2015033220A
Publication Date:
August 21, 2019
Filing Date:
February 23, 2015
Export Citation:
Assignee:
Surpass Industry Co., Ltd.
International Classes:
G01F1/684
Domestic Patent References:
| JP2008511836A | ||||
| JP2003532099A | ||||
| JP2006017721A | ||||
| JP2005061995A | ||||
| JP2012058075A | ||||
| JP2008101965A | ||||
| JP2117494U | ||||
| JP2006519994A | ||||
| JP2011169410A | ||||
| JP60081374U | ||||
| JP8200557A |
Foreign References:
| WO2008090839A1 | ||||
| WO2014176250A1 | ||||
| US20070044554 | ||||
| US3992043 |
Attorney, Agent or Firm:
Noriharu Fujita
Kunio Ueda
Kunio Ueda