Title:
加速器、加速器の運転方法および加速器を用いた半導体の製造方法
Document Type and Number:
Japanese Patent JP6649495
Kind Code:
B2
Abstract:
This accelerator (1) comprises: a radio-frequency cavity (2) wherethrough a charged particle beam (B) can pass; a radio-frequency wave source (3) for sending into the radio-frequency cavity (2) an electromagnetic wave at a fundamental frequency; a laser output unit (10) delivering a laser light (L); a target part (11) irradiated by the laser light (L) to generate a charged particle; a beam extraction unit (12) accelerating the charged particles in one direction to extract the charged particle beam (B); and an output control unit (15) performing control causing the charged particle beam (B) to be emitted toward the radio-frequency cavity (2) at specific timings among the timings corresponding to the periods from the fundamental frequency.
Inventors:
Kawasaki Taisuke
Hiroshi Matsumiya
Haruo Miyadera
Atsushi Miyamoto
Hiroshi Matsumiya
Haruo Miyadera
Atsushi Miyamoto
Application Number:
JP2018537437A
Publication Date:
February 19, 2020
Filing Date:
September 01, 2017
Export Citation:
Assignee:
Toshiba Corporation
Toshiba Energy Systems Co., Ltd.
Toshiba Energy Systems Co., Ltd.
International Classes:
H05H7/18; G03F7/20; H05H9/00
Domestic Patent References:
| JP39030375B1 | ||||
| JP6076990A | ||||
| JP11176595A | ||||
| JP2005228489A | ||||
| JP2008039766A | ||||
| JP2008243375A | ||||
| JP2010253250A | ||||
| JP2014164855A |
Foreign References:
| WO2012043475A1 |
Attorney, Agent or Firm:
Patent business corporation Tokyo International Patent Office