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Title:
ジャイロスコープにおいてモードを整合させるための周波数整合検出方法
Document Type and Number:
Japanese Patent JP6655139
Kind Code:
B2
Abstract:
A method for detecting frequency mismatch in microelectromechanical systems (MEMS) gyroscopes is described. Detection of the frequency mismatch between a drive signal and a sense signal may be performed by generating an output signal whose spectrum reflects the physical characteristics of the gyroscope, and using the output signal to determine the frequency fC of the sense signal. The output signal may be generated by cross-correlating a random or pseudo-random noise signal with a response signal, where the response signal can be obtained by allowing the noise signal to pass through a system designed to have a noise transfer function that mimics the frequency response of the gyroscope. Since the noise signal is random or pseudo-random, cross-correlating the noise signal with the response signal reveals spectral characteristics of the gyroscope. To improve computational efficiency, the cross-correlation can be performed on demodulated versions of the noise signal and the response signal.

Inventors:
Jiefen Yang
Ronald A. Capsta Jr.
Thean Long Chen
Application Number:
JP2018156112A
Publication Date:
February 26, 2020
Filing Date:
August 23, 2018
Export Citation:
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Assignee:
Analog Devices Inc.
International Classes:
G01C19/5726; B81B3/00; H01L29/84
Domestic Patent References:
JP2009162778A
JP2005519296A
JP2015525872A
Foreign References:
US20180128674
DE10248735A1
Attorney, Agent or Firm:
Yasuhiko Murayama
Shinya Mitsuhiro
Tatsuhiko Abe