Title:
切削装置
Document Type and Number:
Japanese Patent JP6689542
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a novel cutting device which can prevent an error of an attached cutting blade.SOLUTION: The cutting device includes: a chuck table; a plurality of cutting unit each having a cutting blade attached to a spindle; a detection unit which detects an identification code formed on the cutting blade; and a control unit which controls each component. The cutting unit has a blade cover of a different shape for each cutting unit. The detection unit has a camera which simultaneously images the identification code and the blade cover to form an image. The control unit includes: a blade cover information registration part in which the combination information of the blade cover with the cutting unit is registered; and a processing condition registration part in which combination information of the cutting blade with the cutting unit according to a processing condition is registered; and a determination unit which determines whether or not the cutting blade according to the processing condition is attached to the cutting unit, from the combination of the identification code and the blade cover in the image.SELECTED DRAWING: Figure 3
Inventors:
Kenta Kasuya
Application Number:
JP2016165676A
Publication Date:
April 28, 2020
Filing Date:
August 26, 2016
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B23Q17/00; B23Q17/24; B24B27/06; B24B49/12
Domestic Patent References:
| JP2015226945A | ||||
| JP2014143323A | ||||
| JP2014075558A | ||||
| JP2014223708A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Tomohiro Okamoto
Kasahara Takahiro