Title:
被加工物のアライメント方法
Document Type and Number:
Japanese Patent JP6689543
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an alignment method for a work piece capable of surely detecting a direction of the work piece.SOLUTION: The present invention relates to an alignment method for a work piece including: a carry-in step for carrying a work piece on which a mark indicating a direction is provided, into a chuck table; a search step for imaging the work piece with an imaging unit while rotating the chuck table in a first direction within a range of a predetermined angle after the carry-in step is implemented, and searching for the mark; a replacement step for carrying the work piece out of the chuck table with a carriage unit in a case where the mark cannot be detected in the search step, retracting the work piece, rotating the chuck table in a second direction that is opposite to the first direction, and thereafter carrying the work piece into the chuck table again; and a direction adjustment step for rotating the chuck table based on the mark that is detected in the search step, and matching the direction of the work piece with a predetermined direction. The search step and the replacement step are repeated until the mark can be detected.SELECTED DRAWING: Figure 5
Inventors:
Matsubara Masayuki
Yagihara Atsushi
Yagihara Atsushi
Application Number:
JP2016166060A
Publication Date:
April 28, 2020
Filing Date:
August 26, 2016
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/68; H01L21/301
Domestic Patent References:
| JP2000021956A | ||||
| JP2007200917A | ||||
| JP6302495A | ||||
| JP2005033018A | ||||
| JP2013235988A | ||||
| JP2015164758A | ||||
| JP2005044938A | ||||
| JP2009021317A | ||||
| JP2016153154A | ||||
| JP2005093710A | ||||
| JP2015026738A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Tomohiro Okamoto
Kasahara Takahiro