Title:
裏面入射型受光素子及び光受信モジュール
Document Type and Number:
Japanese Patent JP6707393
Kind Code:
B2
Abstract:
Provided is a back illuminated photo detector enabling easy determination of whether or not the radius of a beam spot on a light absorption layer is an appropriate size. The back illuminated photo detector includes: a semiconductor substrate having a first surface for receiving light; a semiconductor layer that is laminated on a second surface and includes a light absorption layer; a passivation film so as to expose a contact portion that is part of an upper surface of the semiconductor layer; and an electrode that is in contact with the semiconductor layer in the contact portion, and has a reflectance lower than that of the passivation film. The contact portion includes a center portion located on an optical axis, and an area of the center portion is smaller than a design cross-sectional area of a beam spot.
Inventors:
Hiroshi Hamada
Ryuji Toyonaka
Ryuji Toyonaka
Application Number:
JP2016087023A
Publication Date:
June 10, 2020
Filing Date:
April 25, 2016
Export Citation:
Assignee:
Lumentum Japan Co., Ltd.
International Classes:
H01L31/10
Domestic Patent References:
| JP2003142723A | ||||
| JP2009004812A | ||||
| JP2013080728A | ||||
| JP10117012A | ||||
| JP2011210866A | ||||
| JP2002314118A |
Foreign References:
| US20030178636 |
Attorney, Agent or Firm:
Haruka International Patent Office