Title:
真空バルブ
Document Type and Number:
Japanese Patent JP6760092
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum valve capable of improving pressure adjustment performance in the vicinity of a zero-cross point.SOLUTION: A vacuum valve 1 is configured to drive a valve plate 12 with a motor 13 to control opening of the valve plate 12, where opening deviation between opening θmin at which a ratio of pressure change to opening change becomes maximum, and opening θz at a zero-cross point ZC of a motor current is set.SELECTED DRAWING: Figure 9
Inventors:
Junichiro Kozaki
Application Number:
JP2017003446A
Publication Date:
September 23, 2020
Filing Date:
January 12, 2017
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
F16K31/04; F16K37/00; H02P8/12; H02P8/14
Domestic Patent References:
| JP2010534301A | ||||
| JP2001012633A | ||||
| JP2009112174A | ||||
| JP3237506A | ||||
| JP63023509U | ||||
| JP2015130753A | ||||
| JP2009177981A | ||||
| JP8042734A |
Foreign References:
| US6089537 | ||||
| WO2016052711A1 |
Attorney, Agent or Firm:
Fuyuki Nagai
Morimoto Takuyuki
Morimoto Takuyuki