Title:
検査システムおよび検査方法
Document Type and Number:
Japanese Patent JP6800463
Kind Code:
B2
Abstract:
An inspection system according to one embodiment includes: a first signal output unit that outputs to an illumination unit a first signal serving as a trigger to start outputting stripe patterns; a second signal output unit that outputs to the illumination unit a second signal serving as a trigger to switch the stripe patterns; an image-data acquisition unit that acquires time-correlation image data by starting superimposition of frames output from an image sensor at a timing based on the first signal; an image generation unit that generates a first time-correlation image and a second time-correlation image based on the time-correlation image data, the first time-correlation image corresponding to a first stripe pattern alone, the second time-correlation image corresponding to a second stripe pattern alone; and an abnormality detection unit that detects, based on the first time-correlation image and the second time-correlation image, an abnormality on the inspection target surface.
Inventors:
Keiichi Akazawa
Yasuyuki Inoue
Toru Kurihara
Yasuyuki Inoue
Toru Kurihara
Application Number:
JP2017041045A
Publication Date:
December 16, 2020
Filing Date:
March 03, 2017
Export Citation:
Assignee:
Ricoh Elemex Co., Ltd.
Kochi Public University Corporation
Kochi Public University Corporation
International Classes:
G01N21/88; G01B11/30
Domestic Patent References:
| JP2015197345A | ||||
| JP2004334580A | ||||
| JP2011007576A |
Foreign References:
| US20130278787 |
Attorney, Agent or Firm:
Sakai International Patent Office