Title:
アルキルアミノ置換ハロカルボシラン前駆体
Document Type and Number:
Japanese Patent JP6803368
Kind Code:
B2
Abstract:
Disclosed are Si-containing film forming compositions comprising alkylamino-substituted halocarbosilane precursors, methods of synthesizing the same, and their use for vapor deposition processes.
Inventors:
Claudia Fafar
Glen Kuchen visor
Venkateshwara Art Palem
Jean-Marc Gillard
Naoto Noda
Glen Kuchen visor
Venkateshwara Art Palem
Jean-Marc Gillard
Naoto Noda
Application Number:
JP2018500610A
Publication Date:
December 23, 2020
Filing Date:
July 08, 2016
Export Citation:
Assignee:
Rail Liquide-Societe Anonym Pools Retude e Rex Prosatation de Procede Georges Claude
International Classes:
H01L21/316; C23C16/42
Domestic Patent References:
| JP2006096675A | ||||
| JP2014063860A | ||||
| JP2013100262A |
Foreign References:
| WO2011103282A2 | ||||
| WO2011123792A2 | ||||
| US20130319290 | ||||
| US20060165891 | ||||
| US20140051264 |
Attorney, Agent or Firm:
Mitsue Obuchi
Yukio Fuse
Yukio Fuse