Title:
基板処理装置
Document Type and Number:
Japanese Patent JP6814560
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To shorten a time required for exchanging a substrate.SOLUTION: A substrate processing apparatus comprising a suction port opened to a front surface, comprises: a holding member that sucks and holds a substrate mounted on the front surface by reducing the inner part of the suction port; a decompression mechanism that is communicated with the suction port, can decompress in the suction port, and can recover a pressure in the suction port to be decompressed; a processing part that executes a processing to be determined for the substrate held by the holding member; a processing control part that controls the processing part; a conveying robot that can exchange the substrate by detaching a first substrate mounted on the holding member and mounting another second substrate onto the holding member just after the detachment; and a conveying control part that controls the conveying robot and starts a decompression operation for decompressing the inner part of the suction port of the holding member by the decompression mechanism when allowing the conveying robot to exchange the substrate.SELECTED DRAWING: Figure 4
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Inventors:
Ishida Masahiro
Kohei Tateishi
Kohei Tateishi
Application Number:
JP2016132959A
Publication Date:
January 20, 2021
Filing Date:
July 05, 2016
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/677; H01L21/304
Domestic Patent References:
| JP10270535A | ||||
| JP2013232630A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita
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