Title:
欠陥検査装置及び欠陥検査方法
Document Type and Number:
Japanese Patent JP6828879
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a defect inspection device which facilitates recognizing relevance between a result of defect inspection and a result of film thickness measurement of an inspection object.SOLUTION: The defect inspection device for inspecting an inspection object while transporting the inspection object in a transport direction, includes: a defect detection unit which detects defects of the inspection object on the basis of image data obtained from a line sensor; a film thickness measuring unit which measures a film thickness of the inspection object in a direction orthogonal to the transport direction of the inspection object; and an inspection result generation unit which generates an inspection result map where the defect detection result obtained by the defect detection unit and the film thickness measured by the film thickness measuring unit are represented on a map representing coordinates corresponding to the inspection object, on the basis of the defect inspection result including the defect detection result and first coordinates indicating a position of the defect detection result on the inspection object and the film thickness measurement result including the film thickness and second coordinates indicating a position where the film thickness is measured on the inspection object.SELECTED DRAWING: Figure 1
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Inventors:
Tomoyuki Hara
Application Number:
JP2016192599A
Publication Date:
February 10, 2021
Filing Date:
September 30, 2016
Export Citation:
Assignee:
MEC Corporation
International Classes:
G01B11/06; G01B11/30; G01N21/89
Domestic Patent References:
| JP2012141235A | ||||
| JP2012073204A | ||||
| JP2000009437A | ||||
| JP2013079902A | ||||
| JP4157344A | ||||
| JP2007298416A | ||||
| JP2010256021A |
Attorney, Agent or Firm:
Nishizawa Kazumi
Shiro Suzuki
Yuko Kashiwano
Masatake Shiga
Tadashi Takahashi
Suzuki Mitsuyoshi
Shiro Suzuki
Yuko Kashiwano
Masatake Shiga
Tadashi Takahashi
Suzuki Mitsuyoshi