Title:
シリコン融液の対流パターン推定方法、シリコン単結晶の酸素濃度推定方法、シリコン単結晶の製造方法、および、シリコン単結晶の引き上げ装置
Document Type and Number:
Japanese Patent JP6930458
Kind Code:
B2
Abstract:
A convection pattern estimation method of a silicon melt includes: applying a horizontal magnetic field of 0.2 tesla or more to a silicon melt in a rotating quartz crucible with use of a pair of magnetic bodies disposed across the quartz crucible; before a seed crystal is dipped into the silicon melt to which the horizontal magnetic field is applied; measuring temperatures at a first and second measurement points positioned on a first imaginary line that passes through a center of a surface of the silicon melt and is not in parallel with a central magnetic field line of the horizontal magnetic field as viewed vertically from above; and estimating a direction of a convection flow in a plane in the silicon melt orthogonal to the direction in which the horizontal magnetic field is applied on a basis of the measured temperatures of the first and second measurement points.
Inventors:
Wataru Sugimura
Yokoyama Ryusuke
Toshiyuki Fujiwara
Toshiaki Ono
Yokoyama Ryusuke
Toshiyuki Fujiwara
Toshiaki Ono
Application Number:
JP2018035830A
Publication Date:
September 01, 2021
Filing Date:
February 28, 2018
Export Citation:
Assignee:
Sumco inc.
International Classes:
C30B29/06; C30B15/22
Domestic Patent References:
| JP9263485A | ||||
| JP2009161400A |
Attorney, Agent or Firm:
Intellectual Property Office