Title:
光電子分光装置用試料ホルダ
Document Type and Number:
Japanese Patent JP6935239
Kind Code:
B2
Abstract:
To eliminate charge-up generated in a sample by suppressing contamination on a surface of the sample with a simple device configuration, in a sample holder for a photoelectron spectrometer.SOLUTION: A sample holder holds an insulating sample 2 arranged at a photoelectron spectrometer which irradiates the sample 2 with exciting light 1 so as to analyze energy of photoelectrons 15 generated from the sample 2. The sample holder includes a metal mesh 12 whose metal part has a plurality of openings. The metal mesh 12 is arranged at predetermined distance from the sample 2 in order to eliminate charge-up 16 generated on a surface of the sample 2 by using a part of photoelectrons generated by touching the metal part.SELECTED DRAWING: Figure 1(A)
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Inventors:
Kazuhiro Ueda
Application Number:
JP2017116366A
Publication Date:
September 15, 2021
Filing Date:
June 14, 2017
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01N23/2273
Domestic Patent References:
| JP2003222574A | ||||
| JP2001027623A | ||||
| JP10104180A | ||||
| JP2007285796A |
Foreign References:
| US4680467 |
Attorney, Agent or Firm:
Aoritsu patent business corporation