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Title:
除去部材、校正装置、及びガス分析装置
Document Type and Number:
Japanese Patent JP6935241
Kind Code:
B2
Abstract:
To easily remove removal target substance from calibration gas.SOLUTION: A scrubber 103 includes: an inlet Is; a case 1031; scrubber substance 1034; and an exit Os. The inlet Is is connected to an exhaust port Oc through which calibration gas is exhausted. The case 1031 has an interior space S through which calibration gas Gc taken in from the inlet Is passes. The scrubber substance 1034 is filled into the interior space S of the case 1031 and is solid matter for removing removal target substance contained in the calibration gas Gc passing through the interior space S. The exit Os exhausts the calibration gas Gc whose removal target substance is removed.SELECTED DRAWING: Figure 1

Inventors:
Atsushi Yamamoto
Shigeyuki Akiyama
Nakagawa Satoshi
Application Number:
JP2017118004A
Publication Date:
September 15, 2021
Filing Date:
June 15, 2017
Export Citation:
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Assignee:
HORIBA, Ltd.
International Classes:
G01N21/01; G01N21/61
Domestic Patent References:
JP2010014727A
JP2003247984A
JP2011106861A
JP2002282816A
JP8253432A
JP5034285A
JP2012242311A
JP2013057651A
JP58123356U
JP2012189549A
JP2005238081A
JP5149842A
JP2002039939A
Foreign References:
US20080022752
Attorney, Agent or Firm:
Nao Watanabe
Yukio Ono
Shinji Okazaki