Title:
異なる基板のための共通静電チャック
Document Type and Number:
Japanese Patent JP7398553
Kind Code:
B2
Abstract:
An apparatus, methods and controllers for electrostatically chucking varied substrate materials are disclosed. Some embodiments of the disclosure provide electrostatic chucks with variable polarity and/or voltage. Some embodiments of the disclosure provide electrostatic chucks able to operate as monopolar and bipolar electrostatic chucks. Some embodiments of the disclosure provide bipolar electrostatic chucks able to compensate for substrate bias and produce approximately equal chucking force at different electrodes.
Inventors:
Ramachandran, Vinod
Jupdi, Annan Krishna
Bab, Salat
Jupdi, Annan Krishna
Bab, Salat
Application Number:
JP2022514490A
Publication Date:
December 14, 2023
Filing Date:
September 04, 2020
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/683; H02N13/00
Domestic Patent References:
| JP2016143785A | ||||
| JP6310589A | ||||
| JP9213778A | ||||
| JP2016032096A | ||||
| JP2014533436A |
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation