Title:
キャリア近接マスクのための方法および装置
Document Type and Number:
Japanese Patent JP7398555
Kind Code:
B2
Abstract:
A carrier proximity mask and methods of assembling and using the carrier proximity mask may include providing a first carrier body, second carrier body, and set of one or more clamps. The first carrier body may have one or more openings formed as proximity masks to form structures on a first side of a substrate. The first and second carrier bodies may have one or more contact areas to align with one or more contact areas on a first and second sides of the substrate. The set of one or more clamps may clamp the substrate between the first carrier body and the second carrier body at contact areas to suspend work areas of the substrate between the first and second carrier bodies. The openings to define edges to convolve beams to form structures on the substrate.
Inventors:
Evans, Morgan
Carlson, Charles Tee.
Meyer Timmerman Taisen, Ratger
Bundy, Ross
Carlson, Charles Tee.
Meyer Timmerman Taisen, Ratger
Bundy, Ross
Application Number:
JP2022518199A
Publication Date:
December 14, 2023
Filing Date:
August 06, 2020
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
G02B5/18
Domestic Patent References:
| JP5251824A | ||||
| JP2001329359A | ||||
| JP10319870A | ||||
| JP2013163864A | ||||
| JP2004349367A |
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation