Title:
ナノインプリント用レプリカモールド製作装置
Document Type and Number:
Japanese Patent JP7432254
Kind Code:
B2
Abstract:
The present invention relates to an apparatus for manufacturing a replica mold for a nano implant, the apparatus comprising: a transfer unit for forming a replica mold on a film supplied from one side; a film supply unit which supplies the film toward the transfer unit by intermittently unwinding the film; and a film collecting unit which collects the film from the transfer unit by intermittently winding the film. The transfer unit includes: a stage unit on which a master mold having a pattern, to which a resin is applied, formed thereon is placed; a press roller unit which moves in the horizontal direction and forms the replica mold; and a transfer unit driving unit which is driven to move the press roller unit from a standby position at one side to the other side and to return the press roller unit again to the standby position.
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Inventors:
Kim Tae-won
Jeongmyung-Gyo
Kim Joon-Gi
Park Hee-John
Jung Hee-Suk
Jeongmyung-Gyo
Kim Joon-Gi
Park Hee-John
Jung Hee-Suk
Application Number:
JP2022118805A
Publication Date:
February 16, 2024
Filing Date:
July 26, 2022
Export Citation:
Assignee:
GIGALANE CO., LTD.
International Classes:
H01L21/027; B29C59/02
Domestic Patent References:
| JP6694101B1 | ||||
| JP2014046579A | ||||
| JP2019106527A | ||||
| JP2007281099A | ||||
| JP2011071191A |
Foreign References:
| US4965118 |
Attorney, Agent or Firm:
Patent Attorney Corporation Washida International Patent Office