Title:
同時ＳＴＥＭおよびＴＥＭ顕微鏡
Document Type and Number:
Japanese Patent JP7499207
Kind Code:
B2
Abstract:
Methods for using a single electron microscope system for investigating a sample with TEM and STEM techniques include the steps of emitting electrons toward the sample, forming the electrons into a two beams, and then modifying the focal properties of at least one of the two beams such that they have different focal planes. Once the two beams have different focal planes, the first electron beam is focused such that it acts as a STEM beam that is focused at the sample, and the second electron beam is focused so that it acts as a TEM beam that is parallel beam when incident on the sample. Emissions resultant from the STEM beam and the TEM beam being incident on the sample can then be detected by a single detector or detector array and used to generate a TEM image and a STEM image.
Inventors:
Alexander Henstra
Yuchen Deng
holger cole
Yuchen Deng
holger cole
Application Number:
JP2021054726A
Publication Date:
June 13, 2024
Filing Date:
March 29, 2021
Export Citation:
Assignee:
FEI COMPANY
International Classes:
H01J37/147; G01N23/04; G02B21/00; H01J37/26; H01J37/28
Foreign References:
| WO2006088159A1 | ||||
| US20110210249 | ||||
| US20150243474 | ||||
| US20160056015 | ||||
| US20160351371 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Osamu Miyazaki
Tadahiko Ito
Osamu Miyazaki