Document Type and Number:
Japanese Patent JPH01110440
Kind Code:
U
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Application Number:
JP658188U
Publication Date:
July 26, 1989
Filing Date:
January 20, 1988
Export Citation:
International Classes:
G01R31/26; H01L23/32; H01R33/76; (IPC1-7): H01L23/32; G01R31/26; H01R33/76