Document Type and Number:
Japanese Patent JPH02131259
Kind Code:
U
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Application Number:
JP3962289U
Publication Date:
October 31, 1990
Filing Date:
April 05, 1989
Export Citation:
International Classes:
G01N21/01; G01N21/31; H01J61/09; (IPC1-7): H01J61/09; G01N21/01
Domestic Patent References:
| JP49109453B | ||||
| JPS5021978B1 | 1975-07-26 |