Title:
【考案の名称】プローブボード
Document Type and Number:
Japanese Patent JPH04130440
Kind Code:
U
More Like This:
Inventors:
Satoshi Yoshimura
Application Number:
JP400291U
Publication Date:
November 30, 1992
Filing Date:
February 06, 1991
Export Citation:
International Classes:
G01R31/26; G01R1/073; H01L21/66; (IPC1-7): H01L21/66; G01R31/26
Domestic Patent References:
| JPS6135709A | 1986-02-20 |