Title:
【発明の名称】半導体ウェーハ傾き検出装置
Document Type and Number:
Japanese Patent JPH0617780
Kind Code:
B2
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Inventors:
YOKOI SADAAKI
Application Number:
JP577588A
Publication Date:
March 09, 1994
Filing Date:
January 13, 1988
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
G01B11/26; G06T1/00; H01L21/68; (IPC1-7): G01B11/26; G06F15/62; H01L21/68
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)
Next Patent: HORIZONTAL SCROLL COMPRESSOR