Title:
【発明の名称】二次元型光位置検出素子
Document Type and Number:
Japanese Patent JPH07118551
Kind Code:
B2
Abstract:
PURPOSE:To obtain a two-dimensional light position detecting element capable of detecting an incident position of a light spot with high accuracy even if the incident position is near a collecting electrode, by dividing surface layers including collecting electrodes provided at the opposite ends thereof into a plurality of linear sections, and connecting each set of divided collecting electrodes by a current measurement means. CONSTITUTION:A P-type first surface layer on the top face of a single-crystal silicon is divided into three sections 21, 22 and 23 while a second N-type surface layer on the rear face is also divided into three sections 31, 32 and 33, and an I-type photovoltaic layer 1 is interposed between them, so that a P-I-N photovoltaic element is constituted therebetween. The P-type surface layer sections 21-23 as well as the N-type surface layer sections 31-33 have a width (b) of 1.00mm and are arrayed in parallel with a space (c) of 0.05mm. Collecting electrodes 41, 51, 42, 52, 43, 53 are provided at the opposite ends of the surface layer sections 21-23, while collecting electrodes 61, 71, 62, 72, 63, 73 are provided at the opposite ends of the second surface layer sections 31-33. These electrodes are divided into four sets which are connected to ampere meters 91-94 through connections 81-84, respectively. According to such construction of the element in which the P- and N-type surface layers are divided into three sections, an error which would occur in detecting a position on a diagonal line passing the origin O can be decreased to 1/3 with respect to prior arts.
Inventors:
Akihiko Asano
Application Number:
JP23342087A
Publication Date:
December 18, 1995
Filing Date:
September 17, 1987
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
G01B11/00; H01L31/0248; H01L31/08; H01L31/16; (IPC1-7): H01L31/16
Domestic Patent References:
| JP5956778A | ||||
| JP6319884A |
Attorney, Agent or Firm:
Iwao Yamaguchi