Document Type and Number:
Japanese Patent JPS5054287
Kind Code:
A
Application Number:
JP10232773A
Publication Date:
May 13, 1975
Filing Date:
September 10, 1973
Export Citation:
International Classes:
H01L23/52; H01L21/3205; H01L21/331; H01L21/441; H01L21/60; H01L23/50; H01L29/73; (IPC1-7): H01L21/441; H01L23/50
Domestic Patent References:
| JP45012093A |
Foreign References:
| US3214652A | 1965-10-26 |