Document Type and Number:
Japanese Patent JPS5054288
Kind Code:
A
Application Number:
JP10232873A
Publication Date:
May 13, 1975
Filing Date:
September 10, 1973
Export Citation:
International Classes:
H01L21/768; H01L21/441; H01L23/50; H01L23/522; H01L29/41; (IPC1-7): H01L21/441; H01L23/50