Document Type and Number:
Japanese Patent JPS5068528
Kind Code:
A
Application Number:
JP11869273A
Publication Date:
June 07, 1975
Filing Date:
October 22, 1973
Export Citation:
International Classes:
G03C5/00; C09K13/00; C23F1/00; C23F1/30; G03C5/26; G03F1/00; G03F1/68; G03F1/80; H01L21/027; H05K1/00; (IPC1-7): C09K13/00; C23F1/00; G03C1/02; G03C5/26; H05K1/00