Document Type and Number:
Japanese Patent JPS5174484
Kind Code:
U
More Like This:
Application Number:
JP14957674U
Publication Date:
June 11, 1976
Filing Date:
December 09, 1974
Export Citation:
International Classes:
G01N23/225; H01J37/147; H01J37/252; H01J37/256; (IPC1-7): G01N23/225
Domestic Patent References:
JPS4966396A | 1974-06-27 |