Document Type and Number:
Japanese Patent JPS5214880
Kind Code:
Y2
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| JPS58201230 | ION SOURCE DEVICE |
Application Number:
JP12812574U
Publication Date:
April 04, 1977
Filing Date:
October 22, 1974
Export Citation:
International Classes:
H01J3/04; H01J27/00; H05H7/08; (IPC1-7): H05H7/08