Document Type and Number:
Japanese Patent JPS5389166
Kind Code:
U
Application Number:
JP17212476U
Publication Date:
July 21, 1978
Filing Date:
December 21, 1976
Export Citation:
International Classes:
H01L23/50; H01L21/60; H01L23/48; (IPC1-7): H01L21/60; H01L23/48