Document Type and Number:
Japanese Patent JPS56123547
Kind Code:
U
Application Number:
JP2094380U
Publication Date:
September 19, 1981
Filing Date:
February 20, 1980
Export Citation:
International Classes:
H01L21/205; H01L21/22; H01L21/31; (IPC1-7): H01L21/205; H01L21/22; H01L21/31
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