【発明の名称】半導体装置の製造方法

Title:

【発明の名称】半導体装置の製造方法

Document Type and Number:

Japanese Patent JPS5923101

Kind Code:

B2

Inventors:

MORI TETSUO
ISHIHARA OSAMU
NAKATANI MASAAKI
MITSUI SHIGERU

Application Number:

JP13807277A

Publication Date:

May 30, 1984

Filing Date:

November 16, 1977

Export Citation:

Click for automatic bibliography generation Help

Assignee:

MITSUBISHI ELECTRIC CORP

International Classes:

H01L29/73; H01L21/28; H01L21/3205; H01L21/331; H01L23/52; H01L29/72; H01L29/78; H01L29/80; H05K3/46; (IPC1-7): H01L21/28; H01L29/80

Attorney, Agent or Firm:

Shinichi Kusano

Previous Patent: 電力管理システム、電力管理方法及び上位電力管理装置

Next Patent: JPS5923102