Title:
【発明の名称】軟X線露光用マスクの製造方法
Document Type and Number:
Japanese Patent JPS5923105
Kind Code:
B2
Inventors:
MATSUDA TAKASHI
Application Number:
JP3483376A
Publication Date:
May 30, 1984
Filing Date:
March 30, 1976
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
G03F1/00; G03F1/76; H01L21/027; H01L21/302; (IPC1-7): H01L21/30; G03F1/00
Attorney, Agent or Firm:
Inoue Kazuo