【発明の名称】半導体装置の電極、配線層形成方法

Title:

【発明の名称】半導体装置の電極、配線層形成方法

Document Type and Number:

Japanese Patent JPS594857

Kind Code:

B2

Inventors:

SUZUKI YOSHIKI
YAMAZAKI TERUHIKO
UNO JUN

Application Number:

JP12704478A

Publication Date:

February 01, 1984

Filing Date:

October 16, 1978

Export Citation:

Assignee:

MITSUBISHI ELECTRIC CORP

International Classes:

H01L21/3213; H01L21/302; H01L21/3065; (IPC1-7): H01L21/88; H01L21/302

Attorney, Agent or Firm:

Masuo Oiwa

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