Document Type and Number:
Japanese Patent JPWO2023032083
Kind Code:
A1
Abstract:
An ion beam lens barrel (17) of this charged particle beam device comprises an ion source (41) and an ion optical system (42). The ion optical system (42) comprises an aperture member (62) having formed therein multiple through-holes (62a), from among which a selection is made in order to allow a portion of a beam of ions (ion beam IB) generated from the ion source (41) to pass. A control device of the charged particle beam device records position information of observation axes, that is, predetermined axes in accordance with a reference sample (R) which has been positioned with respect to the predetermined axes, as recognized in an image obtained by irradiating the reference sample (R) with the ion beam. The control device drives the aperture member (62) using a drive mechanism such that predetermined parts forming some of the through-holes (62a) as recognized in an image obtained by irradiating the aperture member (62) with the ion beam are positioned with respect to the observation axes.
Application Number:
JP2023544876A
Publication Date:
March 09, 2023
Filing Date:
September 01, 2021
Export Citation:
