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Patent Searching and Data


Title:
ABRASIVE CLOTH DRESSER
Document Type and Number:
Japanese Patent JP2002283218
Kind Code:
A
Abstract:

To enhance a chemical resistance while maintaining a sharpness equal to that of a conventional electro-deposition dresser in a dresser used for dressing an abrasive cloth for finishing a surface of a semiconductor wafer, etc.

In the abrasive cloth dresser, a plate 1 in which an abrasive material layer 3 is formed on one surface of a disc-like base material 2 is mounted to a flange. The base material 2 is made of synthetic resin and the abrasive material layer 3 is made to an abrasive material layer in which an abrasive grain 4 is bonded/retained by a resin binder. In the dresser, a corrosion owing to the abrasive does not occur by removing a metal material on a part contacted with the abrasive at the time of using the dresser.


Inventors:
HARAGUCHI KENRO
Application Number:
JP2001085343A
Publication Date:
October 03, 2002
Filing Date:
March 23, 2001
Export Citation:
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Assignee:
NORITAKE SUPER ABRASIVE KK
NORITAKE CO LTD
International Classes:
B24B53/12; B24B53/017; B24D3/00; B24D3/28; B24D7/02; H01L21/304; (IPC1-7): B24B37/00; B24B53/12; B24D3/00; B24D3/28; B24D7/02; H01L21/304
Attorney, Agent or Firm:
Hisashi Kato