Title:
ABRASIVE CLOTH AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP3440665
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain an abrasive cloth by which an interlayer insulating layer on an interconnection layer is polished to be flat irrespective of whether an interconnection formed in the interconnection layer As coarse or dense by a method wherein the abrasive cloth which is pasted on a surface plate and which is used to polish, a substrate contains an organic filler.
SOLUTION: The constitutent resin of an abrasive cloth 3 is prepared in such a way that polyurethane prepared by adding 4,4-methylene diophenyl dilsocyanate and ethylene glycol as a chain-length extender to a polyol which is prepared by using ethylene glycol as a diol component and by using adipic acid as a dicarbolylic acid is added to a triisocyanate which its reacted with glycerin, hexamethylene diisocyanate or the like and which comprises three or more functional groups. An inorganic filler such as calcium carbonate or the like is added to, and kneaded width, the constitutent resin of the abrasive cloth 3, it is dispersed uniformly into the constituent resin of the abrasive cloth 3, and it is cross-linked and reacted by a heat treatment. Thereby, although the surface hardness of the abrasive cloth is identical to that of the constitutent resin, the compressive elasticity modulus of the abrasive cloth 3 can be made large as a whole, and an interlayer insulating layer 2c can be polished to be flat.
Inventors:
Masakazu Muroyama
Application Number:
JP33234895A
Publication Date:
August 25, 2003
Filing Date:
December 20, 1995
Export Citation:
Assignee:
ソニー株式会社
International Classes:
B24B37/20; B24B37/22; B24B37/24; H01L21/304; (IPC1-7): H01L21/304; B24B37/00
Domestic Patent References:
| JP7335598A | ||||
| JP8336752A |
Other References:
【文献】国際公開94/004599(WO,A1)
Attorney, Agent or Firm:
Kuninori Funabashi