Title:
加速度センサ
Document Type and Number:
Japanese Patent JP4394212
Kind Code:
B2
Inventors:
Tetsuo Yoshida
Application Number:
JP26021899A
Publication Date:
January 06, 2010
Filing Date:
September 14, 1999
Export Citation:
Assignee:
NEC TOKIN CORPORATION
International Classes:
G01P15/125; G01H11/06; G01L1/14; H01L29/84
Domestic Patent References:
| JP63171334A | ||||
| JP9113385A | ||||
| JP59054904A | ||||
| JP58037799A | ||||
| JP59151029A | ||||
| JP200174569A |
Attorney, Agent or Firm:
Kenho Ikeda
Keisuke Yamamoto
Keisuke Yamamoto