Title:
加速度センサ
Document Type and Number:
Japanese Patent JP4453587
Kind Code:
B2
Abstract:
An acceleration sensor includes: a semiconductor substrate including a support layer and a semiconductor layer, which are stacked in a first direction; a movable electrode and a fixed electrode; and a trench. The movable electrode separately faces the fixed electrode by sandwiching the trench along with a second direction. The trench has a detection distance in the second direction. The movable electrode is movable along with the first direction when acceleration is applied. The movable electrode has a bottom apart from the support layer. The width of the movable electrode along with the second direction is smaller than the width of the fixed electrode. The thickness of the movable electrode along with the first direction is smaller than the thickness of the fixed electrode.
Inventors:
Kazushi Asami
Yukihiro Takeuchi
Kenichi Yokoyama
Yukihiro Takeuchi
Kenichi Yokoyama
Application Number:
JP2005085405A
Publication Date:
April 21, 2010
Filing Date:
March 24, 2005
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01P15/125
Domestic Patent References:
| JP2004361388A | ||||
| JP2004294401A | ||||
| JP2003014778A | ||||
| JP11515092A |
Foreign References:
| US6230566 |
Attorney, Agent or Firm:
Yoji Ito
Takahiro Miura
Fumihiro Mizuno
Takahiro Miura
Fumihiro Mizuno