Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
APPARATUS AND METHOD FOR GROWING CRYSTAL
Document Type and Number:
Japanese Patent JP2009249223
Kind Code:
A
Abstract:

To provide an apparatus for growing a crystal capable of preventing gases present outside a chamber such as oxygen adhered on the surface of a substrate from being brought into a chamber by a simple system when a substrate is conveyed to a chamber.

Between a chamber 2 which becomes a space for growing a crystal on the surface of a substrate 9 and a lifter room 3 where the substrate 9 is conveyed towards the chamber 2, a conveying path forming part 4 which becomes a path for conveying the substrate 9 from the lifter room 3 to the chamber 2 is formed. In the conveying path forming part 4, a guiding tube 5 which is cylindrical, extends parallel to a conveying direction to which the substrate 9 is conveyed and through which the substrate 9 can pass is formed. An inert gas which is supplied from a gas supplying means 6 and fills up in the chamber 2 flows along in contact with the surface of the substrate 9 conveyed in passing through the guiding tube 5.


Inventors:
YASUTAKE KENJI
Application Number:
JP2008098623A
Publication Date:
October 29, 2009
Filing Date:
April 04, 2008
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SHARP KK
International Classes:
C30B29/06; C01B33/02; C30B35/00; H01L21/208
Attorney, Agent or Firm:
Keiichiro Saikyo
Takeshi Sugiyama