To provide a device for transferring objects in plate form and a method and device for treating them, with which high throughput can be obtained.
For a transfer device S2 for transferring plate-form bodies W in between a first treatment device S1 and a second treatment device for performing prescribed treatment operations of the plate-form bodies W, at least one transfer mechanism 42 which can transfer the plate-form bodies W in both directions between the first treatment apparatus S1 and the second treatment device and at least two stand-by sections 41A and 41B in which the plate-form bodies W are temporarily in the stand-by condition, when they are transferred between the first treatment device S1 and the transfer mechanism 42 are provided. In this case, one stand-by section 41A of at least the two stand-by sections 41A and 41B can be set at a temperature allowed by the second treating device.
OGAWA SHIZUO
NAGANO TOSHIHIKO
