Title:
SUBSTRATE CASSETTE APPARATUS
Document Type and Number:
Japanese Patent JP2001274224
Kind Code:
A
Abstract:
To provide a low-cost cassette apparatus with which the presence of several substrates housed in the cassettes can be detected, without causing loss in time for the operations of a robot transferring the substrates.
In a position opposite to a robot 6 between two cassettes 1, which house several substrates 2 and are placed in parallel to each other, a detection unit having detection sensors 7 and 8 corresponding to several stages is moved by a driving means and performs detection of substrates, in the cassettes in one corner of the cassettes 1.
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Inventors:
SHIMADA MUNEAKI
Application Number:
JP2000086318A
Publication Date:
October 05, 2001
Filing Date:
March 27, 2000
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
B65G49/07; G01B11/00; H01L21/67; H01L21/68; (IPC1-7): H01L21/68; B65G49/07
Domestic Patent References:
| JPH10150094A | 1998-06-02 | |||
| JPH10116879A | 1998-05-06 | |||
| JPH11288892A | 1999-10-19 | |||
| JPH11214484A | 1999-08-06 | |||
| JPH10321706A | 1998-12-04 | |||
| JPS61153345U | 1986-09-22 |
Attorney, Agent or Firm:
Kaneo Miyata (1 person outside)
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