Title:
APPARATUS FOR PREPARING HYPER-FINE PARTICLE
Document Type and Number:
Japanese Patent JP3803757
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To propose an apparatus for advantageously manufacturing hyper-fine particles of a uniform grain size distribution by advantageously preventing the aggregation and remelting caused by a force evaporation method.
SOLUTION: The apparatus is equipped with a hyper-fine particle generating chamber 1 and a hyper-fine particle catching chamber 2 connected to the hyper-fine particle generating chamber 1, is arranged with a material placing table 4 and an electrode 5 for discharge in proximity to each other, is provided with an introducing port 7 for gas to be brought into reaction by the arc discharge within the hyper-fine particle generating chamber 1 and conveys the hyper-fine particles generated by the evaporation of the material placed on the material placing table 4 by a gaseous stream. The hyper-fine particle generating chamber 1 has an approximately semi-cylindrical shape and its one end continuing into the hyper-fine particle catching chamber 2 is shaped to consist of a semi-conical shape.
Inventors:
Hideo Okuyama
Uda Masahiro
Yoshio eyes
Masaharu Watanabe
Uda Masahiro
Yoshio eyes
Masaharu Watanabe
Application Number:
JP2003330966A
Publication Date:
August 02, 2006
Filing Date:
September 24, 2003
Export Citation:
Assignee:
National Institute for Materials Science
Atotech Co., Ltd.
Atotech Co., Ltd.
International Classes:
B22F9/14; (IPC1-7): B22F9/14
Domestic Patent References:
JP2022405A | ||||
JP9502920A |
Attorney, Agent or Firm:
Yuuki Okuyama