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Title:
APPEARANCE INSPECTING DEVICE
Document Type and Number:
Japanese Patent JPH05332739
Kind Code:
A
Abstract:
PURPOSE:To shorten inspecting time in a device for inspecting the appearance of the connecting part between the internal lead and electrode of a semiconductor device. CONSTITUTION:An appearance inspecting device has an imaging means 12 having an objective lens 13 and three imaging lenses 15; and three TV cameras 20 paired with each imaging lens 15. Each imaging lens 15 forms the images of the lead, bump and electrode of a sample 1 in different positions, respectively, and the three TV cameras 20 simultaneously pick up the mutually different images in parallel. The imaging means 12 has a concentric down lighting device 17 and an oblique lighting device 19 to form the bright field images of the electrode and the bump and the dark field image of the lead. The colors of the illuminating lights of the concentric down lighting device 17 and the oblique lighting device 19 are varied to each other to vary the colors of the bright field image from the dark field image.

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Inventors:
FUSE TAKASHI
TSUKAHARA HIROYUKI
OSHIMA YOSHITAKA
GOTO YOSHIAKI
Application Number:
JP13546192A
Publication Date:
December 14, 1993
Filing Date:
May 28, 1992
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
G01B11/00; G01B11/24; G01B11/245; G01N21/88; G01N21/956; H01L21/60; (IPC1-7): G01B11/24; G01B11/00; G01N21/88; H01L21/60
Attorney, Agent or Firm:
Teiichi



 
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