Title:
AQUEOUS GRINDING LIQUID FOR WIRE SAW OR HANDSAW
Document Type and Number:
Japanese Patent JP2000327838
Kind Code:
A
Abstract:
To provide an aqueous grinding liquid highly stable in the properties such as abrasive grain dispersibility, resistance to abrasive grain settling and viscosity for a long period of time, free from flammability and a characteristic odor which are found with an oily slurry, and easy to wash and clean cut wafers and equipment.
An aqueous grinding liquid has a composition comprising 40.0-95.0 wt.% polyhydric alcohol and/or its derivative, 5.0-50.0 wt.% water, 0.1-3.5 wt.% bentonite swollen particles, 0.1-5.0 wt.% cellulose and 0.5-10.0 wt.% mica. The bentonite swollen particles, the cellulose and the mica are compositely added so as to obtain a slurry viscosity, measured by a rotational cylindrical viscometer, in the range of 150-300 mPa.s.
Inventors:
OISHI HIROSHI
ASAKAWA KEIICHIRO
MATSUZAKI JUNICHI
ASHIDA AKIO
ASAKAWA KEIICHIRO
MATSUZAKI JUNICHI
ASHIDA AKIO
Application Number:
JP13705999A
Publication Date:
November 28, 2000
Filing Date:
May 18, 1999
Export Citation:
Assignee:
SUPER SILICON KENKYUSHO KK
OTOMO KAGAKU SANGYO KK
OTOMO KAGAKU SANGYO KK
International Classes:
B24B57/02; B24B27/06; C08K3/34; C08K5/00; C08K5/04; C08L1/02; C10M173/02; (IPC1-7): C08L1/02; B24B27/06; B24B57/02; C08K3/34; C08K5/00; C08K5/04
Attorney, Agent or Firm:
Wataru Ogura