Title:
ASHING APPARATUS
Document Type and Number:
Japanese Patent JP2002280366
Kind Code:
A
Abstract:
To restrain the flange part of a quartz chamber from shaving off the inner surface of a packing, when the inside of the quartz is set to a vacuum state in an ashing apparatus.
A flange part 2a and a flange part 2b of the quartz chamber 2 are covered with a packing 3a and a packing 3b from an inner surface part 2ac and an inner surface part 2bc, as well as from a peripheral edge part 2ab and a peripheral edge part 2bb.
Inventors:
TANIGUCHI JUNICHI
Application Number:
JP2001082194A
Publication Date:
September 27, 2002
Filing Date:
March 22, 2001
Export Citation:
Assignee:
SONY CORP
International Classes:
H01L21/302; H01L21/027; H01L21/3065; (IPC1-7): H01L21/3065; H01L21/027
Attorney, Agent or Firm:
Hattori Takeshi
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