Title:
原子間力顕微鏡
Document Type and Number:
Japanese Patent JP4262621
Kind Code:
B2
Inventors:
Nobuaki Sakai
Yoshihiro Ue
Yoshihiro Ue
Application Number:
JP2004090638A
Publication Date:
May 13, 2009
Filing Date:
March 25, 2004
Export Citation:
Assignee:
Olympus Endo Technology America Inc.
International Classes:
G01B11/00; G01Q20/02; G01Q30/02; G01Q30/08; G01Q30/14; G01Q30/20; G01Q60/24; G01Q60/38
Domestic Patent References:
| JP2002082037A | ||||
| JP2000517433A | ||||
| JP2004069428A | ||||
| JP10307144A | ||||
| JP2004156958A | ||||
| JP2005147761A |
Foreign References:
| WO2004063723A1 |