Title:
AUTOMATIC CONVEYANCE VEHICLE, AND AUTOMATIC CONVEYANCE SYSTEM AND AUTOMATIC CONVEYANCE METHOD USING THE SAME, AND MANUFACTURING METHOD OF FLAT PANEL DISPLAY DEVICE
Document Type and Number:
Japanese Patent JP2005135966
Kind Code:
A
Abstract:
To provide a new automatic conveyance vehicle in which a conveyance object can be cooled.
The automatic conveyance vehicle 10 is used for automatically conveying the conveyance objects P, from a loading position to a discharge position. The automatic conveyance vehicle 10 is provided with a conveyance vehicle body 11, a conveyance object loading part 13 disposed in the conveyance vehicle main body 11, and a cooling means 19 which are arranged in the conveyance vehicle body 11 and cool the conveyance objects P loaded on the conveyance object loading part 13.
Inventors:
TANI KENJI
Application Number:
JP2003367271A
Publication Date:
May 26, 2005
Filing Date:
October 28, 2003
Export Citation:
Assignee:
SHARP KK
International Classes:
B23P19/00; B23P21/00; B61B13/00; B65G49/06; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B23P19/00; B23P21/00; B61B13/00; B65G49/06
Attorney, Agent or Firm:
Hiroshi Maeda
Hiroshi Koyama
Yuji Takeuchi
Hiroshi Koyama
Yuji Takeuchi
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