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Title:
BAW RESONATOR AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2009201101
Kind Code:
A
Abstract:

To provide a BAW resonator for increasing an electro-mechanical coupling coefficient compared with when a piezoelectric layer is constituted of an AlN thin film, and increasing a mechanical quality coefficient compared with when the piezoelectric layer is constituted of a PZT thin film, and to provide its production method.

A BAW resonator includes a supporting substrate 1 and a resonator 2, provided on one surface side of the supporting substrate 1, including a lower electrode 20, a piezoelectric layer 30 and an upper electrode 40. The piezoelectric layer 30 is constituted of a piezoelectric thin film including a multi-component perovskite structure constituted of PZT and relaxer perovskite (e.g., PMN-PZT thin film). In a piezoelectric layer forming step, when forming the piezoelectric layer 30 by a sputtering method, the piezoelectric thin film is hetero-epitaxially grown on the one surface side of the supporting substrate 1 by increasing a temperature of the supporting substrate 1 to a specific temperature of 500C or higher, and the supporting substrate 1 is rapidly cooled down from the specific temperature thereafter.


Inventors:
WASA KIYOTAKA
MATSUSHIMA CHOMEI
YAMAUCHI NORIHIRO
HAYAZAKI YOSHIKI
YOSHIHARA TAKAAKI
SHIRAI TAKEO
Application Number:
JP2009010254A
Publication Date:
September 03, 2009
Filing Date:
January 20, 2009
Export Citation:
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Assignee:
PANASONIC ELEC WORKS CO LTD
International Classes:
H03H9/17; H01L41/09; H01L41/18; H01L41/187; H01L41/22; H01L41/316; H01L41/39; H03H3/02
Domestic Patent References:
JP2005328007A2005-11-24
JP2005353755A2005-12-22
JP2005353756A2005-12-22
JP2006032628A2006-02-02
JP2006069837A2006-03-16
JP2006086368A2006-03-30
JPH06350154A1994-12-22
JP2005328006A2005-11-24
JP2005079993A2005-03-24
JP2007295307A2007-11-08
JP2007295025A2007-11-08
JPH06350154A1994-12-22
JP2005328006A2005-11-24
JP2005079993A2005-03-24
JP2007295307A2007-11-08
JP2007295025A2007-11-08
JP2005328007A2005-11-24
JP2005353755A2005-12-22
JP2005353756A2005-12-22
JP2006032628A2006-02-02
JP2006069837A2006-03-16
JP2006086368A2006-03-30
Attorney, Agent or Firm:
Keisei Nishikawa
Atsuo Mori



 
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