Title:
BOAT FOR LATERAL HEAT-TREATMENT OVEN AND HEAT- TREATMENT METHOD
Document Type and Number:
Japanese Patent JP3867509
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a boat for lateral heat treatment that can reduce slip transposition generated during heat treatment without reducing productivity, and to provide a heat treatment method.
SOLUTION: In the boat 1 for lateral heat treatment ovens that supports a wafer 5 by four support bars 3, 3, 4, and 4 having grooves 3a and 4a and at the same time carries out heat treatment, an interval L between the support bars 3 and 3 that are positioned at the bottom section of the boat 1 for lateral heat treatment ovens is set so that a round section 6a of an orientation flat 6 of the wafer 5 comes into contact with a bottom surface 3b of each groove 3a.
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Inventors:
Fujiya Shoichi
Application Number:
JP2001100847A
Publication Date:
January 10, 2007
Filing Date:
March 30, 2001
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
H01L21/683; H01L21/22; H01L21/68; (IPC1-7): H01L21/68; H01L21/22
Domestic Patent References:
| JP6124911A | ||||
| JP62232921A |
Attorney, Agent or Firm:
Yoshio Arafune
Hiroshi Arafune
Hiroshi Arafune