To obtain a method for manufacturing a device which couples the fiber with the plane waveguide and a device which forms both the core of the waveguide and a V groove for the fiber with one mask and laterally arrays them in the same manufacture process.
The device forms a lower clad layer 16 on or in a silicon wafer substrate 14 first by a conventional method and then sticks a core glass layer 18 uniformly thereupon so that the difference between two surfaces becomes minimum. For the pattern formation of the core glass layer 18, one mask is used which has the part of the waveguide 22 and V groove 24 arrayed laterally, and the core of the waveguide 22 is formed to prescribed the position of the V groove 24. The V groove 24 is completely formed by using conventional etching technology. An upper clad 20 is formed on the core of the waveguide and the part between the V groove 24 and the core of the waveguide is partially cut with a saw so as to meet the coupled optical fiber better.
EDOWAADO JIYON RASUKOUSUKII
RONARUDO EDOWAADO SUKOTSUTEI
JIYOSEFU SHIYUMUROBUITSUCHI
Next Patent: METHOD AND MECHANISM FOR MATCHING OPTICAL COMPONENT CONNECTION SURFACE